MPI TS3000-SE – with ShielDEnvironment™

The TS3000-SE is the consequent further development of the TS3000 probe system equipped with MPI ShielDEnvironment™ for ultra-low noise, extremely accurate and highly reliable DC/CV, 1/f, RTS and RF measurements, addressing primarily the needs of the Device CharacterizationWafer Level Reliability and RF & mmW applications.

The exclusive, actively cooled probe platen design provides maximal stability over the wide temperature range from -60° to 300°C and is making the TS3000-SE probe system an excellent choice for testing devices under different thermal conditions.

 TS3000-SE Fact Sheet

 TS3000-SE Data Sheet

Features and Benefits


MPI ShielDEnvironment™ is a high performance local environmental chamber providing excellent EMI- and light-tight shielded test environment for ultra-low noise, low capacitance measurements.


A fully configurable part of the MPI ShielDEnvironment™ which allows up to  4-port RF or up to 8-ports DC/Kelvin or a combination of those configurations. Easy to reconfigure with …


Probe Hover Control™

MPI Probe Hover Control PHC™ allows easy manual control of probe contact and separation to wafer. Separation distance can accurately control with micrometer feedback for probe to wafer/pad positioning. Ease of use guarantees the safest operation by minimizing error during critical set-up and probe change operations.

TS3000-SE Automated Probe System Easy Wafer Loading

Easy Wafer Loading

The dual front door access and the unique chuck design allows easy loading / unloading procedure for 150, 200, 300 mm wafers, wafer fragments or small down to 4×4 mm ICs.

AUX chucks are both located in front where can be loaded…

TS3000 Automated Probe System Integrated Hardware Control Panel

Integrated Hardware Control Panel

The intelligent hardware control panel is completely integrated into the probe system and is designed based on decades of experience and customer interactions to provide faster, safer and convenient system control and test operation. The keyboard and mouse are strategically located to control the software if necessary and will also control the Windows® based instrumentation.

TS3000 SE-Probe-System-Integrated-Hardware-Control-PanelTS3000 SE-Probe-System-Integrated-Hardware-Control-Panel
Chuck Systems MPI ERS PRIME Technology

Thermal Chuck Integration

Due to smart chiller integration, the TS3000 series provide optimized footprint for saving the valuable space in the Lab.

Together MPI and ERS designed the new 300 mm thermal chuck PRIME™ technology family, offering unsurpassed thermal flexibility and the largest variety of thermal…


ERS Patented AC3 Cooling Technology Incorporated

These chucks incorporate the patented AC3 cooling technology and self-management system to purge the MPI ShielDEnvironment™ using recycled cooling air, thus drastically reducing air consumption 30% to 50% as compared to other systems on the market.

Safety Test Management™ (STM) System

Unique STM system prevents opening of the doors during testing – your measurement results are safe. Accidental opening of any system door during a negative chuck temperature is not possible on any event. Furthermore an intelligent dew point control routine avoids acumination during cold testing. The system automatically monitors…


Instruments Integration

The optional instrument shelf reduces cable lengths and increases measurement dynamic and directivity.

Feel the Difference

Software Suite SENTIO®

MPI automated engineering probe systems are controlled by a unique and revolutionary, multi-touch operation SENTIO® Software Suite – simple and intuitive operation saves significant training time, the Scroll, Zoom, Move commands mimic modern smart mobile devices and allows everyone to become an expert in just minutes. Switching between the active application and the rest of the APPs is just matter of a simple finger sweep.

For RF applications, there is no need to switch to another software platform – the MPI RF calibration software program QAlibria® is fully integrated with SENTIO® – for ease of use by following a single operational concept methodology.