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Wafer Probing Station |  200 mm Wafer Prober

Probe Station | Probe System

High Power Manual Probe Systems |  200 mm Wafer Prober  

MPI High Power Manual Probe Systems

MPI High-Power device characterization systems are specifically designed for on-wafer high power device testing. MPI TS150-HP and TS200-HP probe systems provide a complete 150 mm and 200 mm on-wafer solution. They are engineered to achieve low contact resistance measurements of power semiconductor under wide range of temperatures.

Features & Benefits

Air-Bearing Stage

The MPI air-bearing stage design, with simple single-handed puck control, provides unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25x25mm XY-Theta micrometer movement.

MPI TS150-HP & TS200-HP - Air-Bearing Stage

10kV Coaxial or 3kV Triaxial Ambient Chucks

A fully configurable part of the MPI ShielDEnvironment™ which allows up to 4-port RF or up to 8-ports DC/Kelvin or a combination of those configurations.

Easy to reconfigure with convenient shielding that is MPI ShielDCap™ – a lot of little things which make the difference in simplifying day by day operations.

TS150 TS200 TS300 Optic Tilting
TS150 TS200 TS300 Optic Ttilting
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High Voltage / High Current / Ultra High Power Probes

MPI high power probing solutions include dedicated High Voltage (HVP), High Current (HCP) and Ultra High Power (UHP) probes. MPI’s high voltage probes are capable of low leakage current measurements during high voltage tests up to 3kV triaxial or 5 & 10 kV in coaxial set-ups.

The HCP are using MPI propriety multi-contact tips for reduced contact resistance for ultra-high current measurements up to 600A (pulsed).

The UHP probes are combining both capabilities and eliminating the need to change probes for high voltage and current applications.

TS150 TS200 TS300 Optic Tilting
TS150 TS200 TS300 Optic Tilting
TS150 TS200 TS300 Optic Ttilting
TS150 TS200 TS300 Optic Ttilting
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Safe and Accurate

The standard manual High Power probe systems are configured with a DarkBox providing an interlock for safety and EMI-shielding capability  in order to insure low-noise, accurate , and safety measurements.

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Instruments Integration

TS150-HP/TS200-HP can be configured with variety of instrument connection packages, which consists of necessary high voltage / high current probes and cabling accessories for optimal connection to the test instruments such as Keysight B1505 (3 kV or 10 kV) or Keithley  2600-PCT-XB, including integration of 8020 High Power Interface Panel.

TS150 TS200 TS300 Optic Tilting
TS150 TS200 TS300 Optic Ttilting
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