晶圓測試 | 微波探針台 | 微波探頭 | 真空探針台 | 200mm探針台 | 晶圓測試 | 200毫米探針台
Manual Probe Stations | High Power Probe Station
Probe Station | Wafer Test
Wafer Probing Station | High Power Manual Probe Systems
MPI High Power Manual Probe Systems
MPI TS200-HP Probe System
MPI TS150-HP Probe System
MPI High-Power device characterization systems are specifically designed for on-wafer high power device testing. MPI TS150-HP and TS200-HP probe systems provide a complete 150 mm and 200 mm on-wafer solution. They are engineered to achieve low contact resistance measurements of power semiconductor under wide range of temperatures.
Features & Benefits
Air-Bearing Stage
The MPI air-bearing stage design, with simple single-handed puck control, provides unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25x25mm XY-Theta micrometer movement.
10kV Coaxial or 3kV Triaxial Ambient Chucks
A fully configurable part of the MPI ShielDEnvironment™ which allows up to 4-port RF or up to 8-ports DC/Kelvin or a combination of those configurations.
Easy to reconfigure with convenient shielding that is MPI ShielDCap™ – a lot of little things which make the difference in simplifying day by day operations.
High Voltage / High Current / Ultra High Power Probes
MPI high power probing solutions include dedicated High Voltage (HVP), High Current (HCP) and Ultra High Power (UHP) probes. MPI’s high voltage probes are capable of low leakage current measurements during high voltage tests up to 3kV triaxial or 5 & 10 kV in coaxial set-ups.
The HCP are using MPI propriety multi-contact tips for reduced contact resistance for ultra-high current measurements up to 600A (pulsed).
The UHP probes are combining both capabilities and eliminating the need to change probes for high voltage and current applications.
Safe and Accurate
The standard manual High Power probe systems are configured with a DarkBox providing an interlock for safety and EMI-shielding capability in order to insure low-noise, accurate , and safety measurements.
Instruments Integration
TS150-HP/TS200-HP can be configured with variety of instrument connection packages, which consists of necessary high voltage / high current probes and cabling accessories for optimal connection to the test instruments such as Keysight B1505 (3 kV or 10 kV) or Keithley 2600-PCT-XB, including integration of 8020 High Power Interface Panel.