手動探針台 | 真空探針台 | 探針台 | 晶圓測試 | 真空探針台 | 晶圓測試 | 晶圓探針測試
Manual Probe Stations | 200 mm Wafer Prober
300 mm Probe Station | Wafer Test
Manual Probe Stations | High Power Probe Station
MPI High Power Manual Probe Systems
MPI TS200-HP Probe System
MPI TS150-HP Probe System
MPI High-Power device characterization systems are specifically designed for on-wafer high power device testing. MPI TS150-HP and TS200-HP probe systems provide a complete 150 mm and 200 mm on-wafer solution. They are engineered to achieve low contact resistance measurements of power semiconductor under wide range of temperatures.
Features & Benefits
Air-Bearing Stage
The MPI air-bearing stage design, with simple single-handed puck control, provides unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25x25mm XY-Theta micrometer movement.
10kV Coaxial or 3kV Triaxial Ambient Chucks
Chuck options include MPI’s 10 kV coaxial or 3 kV triaxial ambient chucks or various ERS thermal chucks to support temperature measurement from -60°C and up to 300 °C. The thermal touch controller is designed to be mounted on the prober itself for quick and convenient operation.
A chuck top tray, with electrical connection for biasing, is an easy add-on for any high power chucks at ambient temperature. The tray is designed to retain Fluorinert™ liquid for a cost effective anti-arcing solution.
*Fluorinert is a trademark of 3M Company, USA
High Voltage / High Current / Ultra High Power Probes
MPI high power probing solutions include dedicated High Voltage (HVP), High Current (HCP) and Ultra High Power (UHP) probes. MPI’s high voltage probes are capable of low leakage current measurements during high voltage tests up to 3kV triaxial or 5 & 10 kV in coaxial set-ups.
The HCP are using MPI propriety multi-contact tips for reduced contact resistance for ultra-high current measurements up to 600A (pulsed).
The UHP probes are combining both capabilities and eliminating the need to change probes for high voltage and current applications.
Safe and Accurate
The standard manual High Power probe systems are configured with a DarkBox providing an interlock for safety and EMI-shielding capability in order to insure low-noise, accurate , and safety measurements.
Instruments Integration
TS150-HP/TS200-HP can be configured with variety of instrument connection packages, which consists of necessary high voltage / high current probes and cabling accessories for optimal connection to the test instruments such as Keysight B1505 (3 kV or 10 kV) or Keithley 2600-PCT-XB, including integration of 8020 High Power Interface Panel.