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Wafer Probe Station | Wafer Probe Stations

MPI Manual Probe Systems

Standard Open Systems

MPI TS150, TS200 & TS300 manual probe systems are open, easy to use and cost effective yet highly accurate. These systems are designed for precision analysis of substrates and wafers up to 150, 200 and 300mm.


They may be configured to support a wide variety of applications such as Failure AnalysisDesign Validation/IC Engineering, Wafer Level Reliability, MEMS, High Power and Device Characterization and Modeling as well.

Manual Probe Station

Dedicated System for mmW and THz Application

MPI TS150–THZ engineering probe system is a dedicated, cost effective, manual probe system designed especially for precision analysis of substrates and 150 mm wafers in sub THz range.  The system is extremely stable, with a large probe platen, and a low-profile design. Each of these essential elements are required to support a wide variety of RF and mmW applications such as broadband up to 110 GHz, banded solutions up to 1.1THz, load-pull and RF noise. 

150mm Probe System

Shielded System

The MPI TS200-SE probe system incorporates the ShieldEnvironment™ providing optimal EMI shielding which allows ultra-low noise device on-wafer measurements for many applications such as Device Characterization and Modeling, RF & Microwave, Failure Analysis, Design Validation, and High Power up to 200mm wafer size.

The modular design concept of all MPI manual probe systems allows a unique upgrade path towards reduced cost of ownership.

150mm Probe System
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