大功率手動探針系統 | 大功率探針台} | 自動探測系統 | 探針台 | 200毫米Wafer Prober | 手動探針台 

200 mm Wafer Prober |  150 mm Wafer Prober

300 mm Probe Station | Wafer Probe Stations300 mm Wafer Probing

150 mm Wafer Prober |  Wafer Probing Station  

MPI High Power Probe Systems

10 kV – 600 A

 

MPI High-Power device characterization systems are specifically designed for on-wafer high power device testing. These systems support up to 3 kV triaxial / 10 kV coaxial and 600 A (pulsed) accurate measurements while providing a low-noise, fully shielded test environment.

 

MPI High Power Technologies

 

MPI High-Power device characterization systems are specifically designed for on-wafer high power device testing. These systems support up to 3 kV triaxial / 10 kV coaxial and 600 A (pulsed) accurate measurements while providing a low-noise, fully shielded test environment.

High Voltage, High Current and Ultra-High Power Probes

MPI high power probing solutions include dedicated high voltage, and high current probes, which use MPI propriety multi-contact tips for reduced contact resistance. MPI’s high voltage probes are capable of low leakage current measurements during high voltage tests up to 3 kV triaxial or 5 kV & 10 kV coaxial set-ups. In addition, MPI Ultra-High-Power probes provides solution for on wafer measurement of ultra-high power devices up to 10kV/600A.

TS150 TS200 TS300 Optic Tilting
TS150 TS200 TS300 Optic Ttilting
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Proprietary Triaxial Chuck Connection

MPI’s proprietary triaxial connector offers very easy reconfiguration between, ultra-low noise 3kV triaxial and 10kV coaxial set-ups without any changes to the chuck connection.

High Power Chucks

The MPI ambient or ERS AirCool® thermal Chucks supports wide-range of temperature from -60°C to 300°C are manufactured with low contact resistance and gold plated chuck tops. The chucks are fully integrated assemblies and are capable of holding wafers as thin as 70 µm. Users can configure high power chucks to support Taiko wafer types.

 

TS150 TS200 TS300 Optic Tilting
TS150 TS200 TS300 Optic Ttilting
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LiquidTray™

Specially designed anti-arcing LiquidTray™ can be used for arcing suppressing by simply place on the high power chuck surface. Wafers can be safely placed inside the tray to submerge in the liquid for arcing free high voltage test.

 

MPI Anti-arcing LiquidTray™

Anti-Arcing Probe Card

In addition, MPI is offering optional temperature control of the pressurized air in a range of 20 to 200 °C, which correlate direct with the chuck set temperature. High-voltage testing without arcing at higher temperatures are possible now.

 

MPI Anti-arcing Probe Card

Instruments Integration

TS150-HP/TS200-HP can be configured with variety of instrument connection packages, which consists of necessary high voltage / high current probes and cabling accessories for optimal connection to the test instruments such as Keysight B1505 (3 kV or 10 kV) or Keithley  2600-PCT-XB, including integration of 8020 High Power Interface Panel.

TS150 TS200 TS300 Optic Ttilting
TS150 TS200 TS300 Optic Ttilting
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High Power Probe System Solutions

MPI high power probing solutions offer variety of probing systems which include manualautomated and fully-automated versions to provide solution for different budgets and specific requirements.

Manual high power systems provide flexibility and cost-effective solutions for research institutes, universities, and foundries that need complex and accurate device characterization but not require to do high volume measurements. These systems are designed to connect with advanced high power measurement instruments to support advanced research works, without compromising the usability, safety and the measurement accuracy up to 3 kV (triax) / 10 kV (coax) and 600 A (pulsed).

MPI automated high power systems provide automated high through-put measurements by programming step-and-repeat functionality through MPI SENTIO® prober control software.

TS2000-DP is designed for open and flexible measurement set up with supporting over temperature measurement up to 300°C. Its open platen design makes it possible to upgrade system for voltage higher than 10 kV, in the future and hence provide value for your investment.

TS2000-HP and TS3000-HP comes with MPI ShielDEnvironment™, providing wide temperature range from negative temperature as low as -60°C to higher temperature of 300°C and ultra-low-noise measurement capability in addition.

TS2500 and TS3500 Series, can be configured as “High-Power” versions as well, in order to provide ultimate automation and flexibility of testing multiple wafers unintendedly.

Manual Probe SystemManual Probe Station
High Power Probe StationHigh Power Probe Station
High Power 300 mm Probe StationHigh Power 300 mm Probe Station
RF Probe StationRF Probe Station
High Power Probe StationHigh-Power Probe Station
300 mm Wafer Probe Station300 mm Wafer Probe Station
Automatic Probe StationAutomatic Probe Station
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Safety Requirement

Regulatory approved, all MPI high power systems are configured with a safety interlock enabled dark box or an infrared laser light curtain design to provide a safe testing environment.

MPI High Power Selection Guide

1995公司成立
1997與日本MJC公司展開技術合作
1998建立Memory 32 DUT晶圓探針卡之服務能力
1999建立50μm fine pitch晶圓探針卡之製程技術
 自有廠房開工動土
2000自有廠房正式啟用 (竹北)
 南部辦公室客服中心成立
2001通過ISO9001認証
 推出應用於LED產業之晶圓針測機
 獲經濟部工業局核定為『新興重要策略性產業』
2002興櫃股票登錄
2003股票上櫃掛牌
 自有廠房第一次擴廠
 垂直試探針卡正式量產
2004自有廠房第二次擴廠
 首度進入全球前十大探針卡供應商行列 -全球第六大
2006高雄路竹一廠完工啟用
2007高雄路竹二廠完工啟用
2008第五次取得經濟部工業局”新興重要策略性產業”核准函
2009名列智財局公告『97年本國法人發明發證百大排名』
2012旺矽二廠廠房落成啟用 (竹北)
2014旺矽三廠廠房啟用 (新埔)
2017旺矽美國子公司設立 (美國加州矽谷)
旺矽蘇州子公司設立 (中國蘇州)

      Scroll Right  >>

1995公司成立
1997與日本MJC公司展開技術合作
1998建立Memory 32 DUT晶圓探針卡之服務能力
1999建立50μm fine pitch晶圓探針卡之製程技術
 自有廠房開工動土
2000自有廠房正式啟用 (竹北)
 南部辦公室客服中心成立
2001通過ISO9001認証
 推出應用於LED產業之晶圓針測機
 獲經濟部工業局核定為『新興重要策略性產業』
2002興櫃股票登錄
2003股票上櫃掛牌
 自有廠房第一次擴廠
 垂直試探針卡正式量產
2004自有廠房第二次擴廠
 首度進入全球前十大探針卡供應商行列 -全球第六大
2006高雄路竹一廠完工啟用
2007高雄路竹二廠完工啟用
2008第五次取得經濟部工業局”新興重要策略性產業”核准函
2009名列智財局公告『97年本國法人發明發證百大排名』
2012旺矽二廠廠房落成啟用 (竹北)
2014旺矽三廠廠房啟用 (新埔)
2017旺矽美國子公司設立 (美國加州矽谷)
旺矽蘇州子公司設立 (中國蘇州)

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