Probe Stations

200mm Probe Station

Wafer Prober

Automated Probe Station

Silicon Photonics Probe Station

Semi Automatic Wafer Prober

Wafer Probing

Automated Probe Systems

Electrical Probe Station

Vacuum Probe System

Wafer Probing System

Semi Automatic Wafer Prober

TS3X00-HP – Advanced 300 mm High Power Solutions


The TS3000-HP and TS3500-HP are MPI’s two new, dedicated probe stations for on-wafer High-Power device characterization over a wide -60°C to +300°C temperature range and wide 3 kV (triax) / 10 kV (coax) and 600 A measurement range. Testing on thin or Taiko wafers is an option available for both systems.

Both systems incorporate MPI’s ShielDEnvironment™ for ultra-low noise measurements and with the WaferWallet®, TS3500-HP is the ideal choice for increased demands in productivity (up to 10x higher) and handling fully-automatic wafer-handling e.g., 150 mm SiC, 200 mm GAN, as well as 300 mm SiGe wafers.

For more details, please click TS3000-SE or TS3500-SE.