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Manual Wafer Prober | Manual Prober System 

Probe Systems | Manual Wafer Prober 

Manual Prober System | Manual Wafer Prober

MPI TS300-SE Probe System

MPI TS300-SE - 300 mm Manual Probe System with ShielDEnvironment™

The MPI TS300-ShielDEnvironment™ (TS300-SE) is designed to ensure advanced EMI/RFI/light-tight shielding, ultra-low noise, low leakage measurement capabilities on 300 mm wafer in a temperature range from -60 to +300°C.

It’s incorporated with vibration isolation table at optimal height to make the daily operation very convenient.

Features & Benefits


MPI ShielDEnvironment™ is a high performance local environmental chamber providing excellent EMI- and light-tight shielded test environment for ultra-low noise, low capacitance measurements.



A fully configurable part of the MPI ShielDEnvironment™ which allows up to 4-port RF or up to 8-ports DC/Kelvin or a combination of those configurations.

Easy to reconfigure with convenient shielding that is MPI ShielDCap™ – a lot of little things which make the difference in simplifying day by day operations.

MPI ShielDCap™

Air-Bearing Stage

The TS300-SE has a unique stage concept combining MPI air-bearing stage design, with simple one handed puck control, provides incredibly convenient operation for fast XY navigation and quick wafer loading with the accurate and fine positioning capability in addition over the entire travel range. Please check the unique Z chuck control in addition.

MPI TS300-SE - Air Bearing Stage



Unique Platen Lift
with Probe Hover Control™

The repeatable (1 μm) platen lift design has three discrete positions for contact, separation (300 μm), and loading (3 mm). The lift includes a safety lock rotation utility which prevents accidental platform descent. These features offer unparalleled functionality and are standard offerings for the MPI TS300-SE manual probe system. Prevention of unexpected probe or wafer damage is critical to system design and provides intuitive control, accurate contact positioning, safe set-ups, and easy step and repeat functionality.


Additional Probe Hover Control™ comes with hover height (50, 100 or 150 μm) for easy and convenient probe to pad alignment.

Unique Chuck Z Adjustment

TS300-SE incorporates in addition to the air bearing XY stage – 5 mm Z chuck adjustment in µm resolution for fine and accurate contact / over-travel control or probe cards drop tip correction.

A 1 mm scale indicator provides easy feedback to the operator. 20 mm pneumatic lift in addition offers easy and continent  loading / unloading procedure.

MPI TS300-SE - Chuck Z Control

Various Chuck Options

The TS300-SE is available with various chuck options to meet different budgets and application requirements.

Together MPI and ERS designed the New 300 mm Thermal Chuck AirCool® PRIME Technology family, offering unsurpassed thermal flexibility with reduced soaking time by 60%, and the largest variety of thermal ranges on market.

Reduced transition time, improved electrical performance, easier testing under inert-gas atmosphere, and field upgradability are additional values of the AirCool® PRIME thermal chuck systems.

The Ambient Chucks are available in the following versions: Coaxial, Triaxial or RF with two auxiliary ceramic chucks for accurate stable RF calibration.

MPI TS300-SE - Chucks

Thermal Control Integration

The wafer loading door is  locked at any temperature below 15°C – this unique feature makes the TS300-SE the safest manual probe station in the market.

Furthermore, the thermal chuck can be operated via the fully integrated touchscreen display, ergonomically mounted in a convenient location on the prober for fast adjustment and immediate feedback.

MPI TS300-SE - Integrated Thermal Chuck Controller Panel

ERS Patented AC3 Cooling Technology Incorporated

These chucks incorporate the ERS patented AC3 cooling technology and its air management system to purge the MPI ShielDEnvironment™ directly from “already used” air – reducing dry air consumption up to 30 to 50% as compared to other systems on the market.

ERS Patented AC3 Cooling Technology

Various Optic Options

MPI Optics are available with a choice between a single tube MPI SuperZoom™ SZ10, the MegaZoom™ MZ12 with up to 12x optical zoom and more than 42 mm working distance or EyeZoom™  EZ10 – the 10x optical zoom optic with ergonomic 20x eyepieces, 90 mm working distance and down to 2 µm optical resolving power.


Unique Upgrade Path

The modular design of the TS300-SE modular creates a unique upgrade path. All TS300-SE probing accessories, such as thermal chucks, microscope and positioners, can be upgraded or reconfigured to variety of application requirements covering tool lifespan for increasingly low cost of ownership.

The MPI TS300-SE probe systems with ShielDEnvironment™ provides maximum EMI shielding and allows for low noise device on-wafer measurements for wide verity of applications such as Device Characterization and Modeling, RF/Microwave, Wafer Level Reliability, Failure Analysis, Design Validation, and High Power.