MPI TS3000 Automated Probe System

The TS3000 from MPI is an automated 300 mm probe system, specifically designed for Product Engineering, Failure Analysis, Design Validation, Wafer Level Reliability and RF & mmW applications.

The TS3000 feature set provides:

  • Maximum on temperature range -60…300°C
  • Maximum on flexibility
  • Minimum cable distance to functional testers with a design specific cable interface for better measurement directivity
  • Minimum platen-to-chuck height for optimal mmW & internal node probing
  • Minimum system footprint which integrates the thermal system’s chiller “inside”

which combined together make the TS3000 probe station unique to MPI Corporation and to the product engineering market.

 TS3000 Fact Sheet

 TS3000 Data Sheet

Features and Benefits

IceFreeEnvironment™

Incorporating MPI’s IceFreeEnvironment™ the TS3000 accommodates testing with MicroPositioners and / or probe cards over a wide temperature range of -60…300°C on up to 300 mm wafers with additional capability for probing on film-frames.

Large Probe Platen

TS3000 provides large, easily accessible probe platen in order to accommodate up to 12x DC or 4x RF MicroPositioners with minimum of platen-to-chuck height.

Integration of Load-Pull Tuners or larger area MicroPositioners makes TS3000 system an idea choice for RF and mmW measurements….

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TS3000 Automated Probe System Easy Wafer Loading

Easy Wafer Loading

The dual front door access and the unique chuck design allows easy loading / unloading procedure for 150, 200, 300 mm wafers, wafer fragments or even small down to 5×5 mm ICs.

AUX chucks are both located in front where can be loaded…

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Integrated Hardware Control Panel

The intelligent hardware control panel is completely integrated into the probe system and is designed based on decades of experience and customer interactions to provide faster, safer and convenient system control and test operation. The keyboard and mouse are strategically located to control the software if necessary and will also control the Windows® based instrumentation.

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TS3000 Thermal Chuck Integration

Thermal Chuck Integration

Due to smart chiller integration, the TS3000 series provide optimized footprint for saving the valuable space in the Lab.

MPI offers the largest variety of thermal ranges on market, starting with the typically -60°C, -40°C, adding now -10°C, 0°C, 20°C and 30°C and at end to 200°C or 300°C – all this…

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ERS patented AC3 cooling technology incorporated

These chucks incorporate the ERS patented AC3 cooling technology and its air management system to purge the MPI IceFreeEnvironment™ directly from “already used” air – reducing dry air consumption up to 50% as compared to other systems on the market….

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Probe Cards & MicroPositioners – Simultaneously

Single probes, low-profile probe card holder for 4.5” x 11” probe cards, and lower plate to chuck distance are ideal for simultaneous probing with passive / active high impedance probes, especially at negative temperatures; making the system a perfect choice for Design Validation and / or Failure Analysis work.

Safety Test Management™ (STM) system

Unique STM system prevents opening of the doors during testing – your measurement results are safe. Accidental opening of any system door during a negative chuck temperature is not possible on any event. Furthermore an intelligent dew point control routine avoids acumination during cold testing. The system automatically monitors…

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Instruments Integration

The optional instrument shelf reduces cable lengths and increases measurement dynamic and directivity at RF and mmW applications.

Feel the Difference

Software Suite SENTIO®

MPI automated engineering probe systems are controlled by a unique and revolutionary, multi-touch operation SENTIO® Software Suite – simple and intuitive operation saves significant training time, the Scroll, Zoom, Move commands mimic modern smart mobile devices and allows everyone to become an expert in just minutes. Switching between the active application and the rest of the APPs is just matter of a simple finger sweep.

For RF applications, there is no need to switch to another software platform – the MPI RF calibration software program QAlibria® is fully integrated with SENTIO® – for ease of use by following a single operational concept methodology.