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Manual Probe Station | 200 mm Wafer Probing
MPI TS2000 Series – The Evolution
Recognize the Difference
MPI TS2000 is a natural evolution of the world-wide and well established Probe System with dedicated designs addressing Advanced Semiconductor Test market requirements. The system is fully compatible with the all MPI system accessories and is designed primarily to address of Failure Analysis, Design Verification, IC engineering, Wafer Level Reliability as well as special requirements for MEMS, High Power, RF and mmW device testing.
Available for ambient and/or hot only temperature operation modes the TS2000 is fast with speed up to 10 Dies/second (depends on the final configuration), which makes it an ideal choice for pre-production electrical tests on discrete RF devices, as example.
Features & Benefits
Large Probe Platen
TS2000 Series provides large, easily accessible probe platen in order to accommodate up to 12x DC or 4x RF MicroPositioners.
Integration of Load-Pull Tuners or larger area MicroPositioners makes TS2000 system an ideal choice for RF and mmW measurements.
Easy Wafer Loading
The large front door access allows easy loading / unloading procedure for 100, 150, 200 mm wafers, wafer fragments or even small down to 5×5 mm ICs.
AUX chucks are both located in front where can be loaded / unloaded very conveniently. No roll-out stage allows for a simple method of automation for RF calibration and probe card cleaning.
Integrated Hardware Control Panel
The intelligent hardware control panel is completely integrated into the probe system and is designed based on decades of experience and customer interactions to provide faster, safer and convenient system control and test operation. The Keyboard and mouse are strategically located to control the software if necessary and will also control the Windows
Thermal Chuck Integration
The thermal chucks (from 20°C or ambient to max 300°C) can be operated by using the fully integrated touchscreen display, placed at convenient location in front of the operator for fast operation and immediate feedback.
Probe Cards & MicroPositioners – Simultaneously
TS2000-D is simply the TS2000 with already integrated DarkBox!
Designed for optimal footprint, embedded interlock, LED illumination and standardized interface panels to various measurement instruments, the system is a preferred choice for light and Laser safety protected test environment.
The easy access from the back panel makes re-configuration or initial set-up fast and very convenient.
The optional instrument shelf reduces cable lengths and increases measurement dynamic and directivity at RF and mmW applications.
The TS2000 incorporates two types’ vibration isolation solutions to better operate in different lab test environment. The total footprint is comparable or smaller than state of the art stand-alone vibration isolation tables commonly used in the industry.
Software Suite SENTIO
MPI automated engineering probe systems are controlled by a unique and revolutionary, multi-touch operation SENTIO
For RF applications, there is no need to switch to another software platform – the MPI RF calibration software program QAlibria