MPI TS2000-SE – The Future Starts Now

Measure the Difference

The TS2000-SE from MPI is the first ever 200 mm automated engineering probe system on the market integrating innovative features specifically designed to reduce the cost of test. These features are incorporated into the MPI ShielDEnvironment™ for ultra-low noise, very accurate and highly reliable DC/CV, RF and High Power measurements.

MPI-AST-V20-001TS2000-SE Fact Sheet

MPI-AST-V20-001 TS2000-SE Data Sheet

Features & Benefits


MPI ShielDEnvironment™ is a high performance local environmental chamber providing excellent EMI- and light-tight shielded test environment for ultra-low noise, low capacitance measurements.

TS2000 SE Automated Probe System ShielDCap


A fully configurable part of the MPI ShielDEnvironment™ which allows up to  4-port RF or up to 8-ports DC/Kelvin or a combination of those configurations. Easy to reconfigure with …


Automated single wafer loader

This feature provides for very convenient wafer loading with easy pre-alignment for automated routines. Loading or unloading of 100, 150 or 200 mm wafer is straight forward and intuitive. No roll-out stage allows for a simple method of automation for RF calibration and probe card cleaning.

Safety Test Management™ (STM) System

Unique STM system prevents opening of any doors during testing – your measurement results are safe. Accidental opening of any system door during a negative chuck temperature is not possible on any event. Furthermore an intelligent…

TS2000-SE Hotcold WaferSwaps(

Hot/Cold Wafer Swaps at Set Temperatures

The automated single wafer loader and the safety test management provide a unique capability to load/unload wafers at any chuck temperatures. Cooling down or heating up to…

TS2000-SE Automated Probe System Vertical Controlled Environment

Vertical Control Environment™ (VCE)

With an automated side view of the probe tips – the VCE™ allows contact position automation independent of the probe card tip-drop.
This enables working with probe cards, either DC or RF, very safe, especially inside the MPI ShielDEnvironment™.

ERS Patented AC3 Cooling Technology Incorporated

These chucks incorporate the ERS patented AC3 cooling technology and its air management system to purge the MPI ShieldEnvironment™ directly from “already used” air – reducing dry air consumption up to 30% to 50% as compared to other systems on the market.

Thermal and Vibration Control

The thermal chuck can be operated by using the fully integrated touchscreen display, placed at convenient location in front of the operator for fast and operation and immediate feedback…


Integrated Hardware Control Panel

The intelligent hardware control panel is completely integrated into the probe system and is designed based on decades of experience and customer interactions to provide …


Instruments Integration

The optional instrument shelf reduces cable lengths and increases measurement dynamic and directivity.

Feel the Difference

Software Suite SENTIO®

MPI automated engineering probe systems are controlled by a unique and revolutionary, multi-touch operation SENTIO® Software Suite – simple and intuitive operation saves significant training time, the Scroll, Zoom, Move commands mimic modern smart mobile devices and allows everyone to become an expert in just minutes. Switching between the active application and the rest of the APPs is just matter of a simple finger sweep.

For RF applications, there is no need to switch to another software platform – the MPI RF calibration software program QAlibria® is fully integrated with SENTIO® – for ease of use by following a single operational concept methodology.