TS3500 Series with WaferWallet® = Accuracy + Flexibility + Automation
TS3500 and TS3500-SE are equivalent in features to MPI’s well-known and established TS3000 and TS3000-SE 300 mm probe stations with the added fully-automated capability by configuring or upgrading with MPI’s unique WaferWallet
Features & Benefits
The WaferWallet®
Common practice for Device Characterization in the Modeling and New Technology Development processes is to extract data from a typical few wafers via extremely accurate IV-CV, 1/f, RF, mmW, and Load-pull measurements.
MPI’s WaferWallet
Hot and Cold Wafer’s Swapping
Returning the chuck to ambient is no longer required during the wafer loading and unloading process. With the WaferWallet
Test Automation
Simple and cost-effective manual in-tray wafer alignment via notch indicator makes initial wafer loading fast and reliable. Dependent upon operational methodology, other options include wafer Pre-aligner, ID reader or PTPA capability on the TS3500-SE are additional features increasing levels of automation.
SENTIO® Dashboard
MPI’s SENTIO
- Multi-touch, intuitive operation
- Single window GUI, like common mobile devices
- Dashboard view of the system status for simplified navigation
- Intelligent, predictable operational guidance
- Free upgrades for the life of the probe station
With a simple view of the WaferWallet