Manual Probe Stations | 200 mm Wafer Prober | Automated Probe System | Probe System | 150 mm Wafer Prober | Manual Probe Stations
Wafer Probing Station | High Power Manual Probe Systems
Probe Station | Probe Station
Wafer Probing Station | Wafer Probing Station
MPI High Power Probe Systems
10 kV – 600 A
MPI High-Power device characterization systems are specifically designed for on-wafer high power device testing. These systems support up to 3 kV triaxial / 10 kV coaxial and 600 A (pulsed) accurate measurements while providing a low-noise, fully shielded test environment.
High Power Probe System Solutions
Manual high power systems provide flexibility and cost-effective solutions for research institutes, universities, and foundries that need complex and accurate device characterization but not require to do high volume measurements. These systems are designed to connect with advanced high power measurement instruments to support advanced research works, without compromising the usability, safety and the measurement accuracy up to 3 kV (triax) / 10 kV (coax) and 600 A (pulsed).
TS2000-DP is designed for open and flexible measurement set up with supporting over temperature measurement up to 300°C. Its open platen design makes it possible to upgrade system for voltage higher than 10 kV, in the future and hence provide value for your investment.
TS2000-HP and TS3000-HP comes with MPI ShielDEnvironment™, providing wide temperature range from negative temperature as low as -60°C to higher temperature of 300°C and ultra-low-noise measurement capability in addition.
High Voltage, High Current and Ultra-High Power Probes
MPI high power probing solutions include dedicated high voltage, and high current probes which use MPI propriety multi-contact tips for reduced contact resistance. MPI’s high voltage probes are capable of low leakage current measurements during high voltage tests up to 3 kV triaxial or 5 kV & 10 kV coaxial set-ups. In addition, MPI Ultra-High-Power probes provides solution for on wafer measurement of ultra-high power devices up to 10kV/600A.
Proprietary Triaxial Chuck Connection
MPI’s proprietary triaxial connector offers very easy reconfiguration between, ultra-low noise 3kV triaxial and 10kV coaxial set-ups without any changes to the chuck connection.
High Power Chucks
The MPI ambient or ERS AirCool
Specially designed anti-arcing LiquidTray™ can be used for arcing suppressing by simply place on the high power chuck surface. Wafers can be safely placed inside the tray to submerge in the liquid for arcing free high voltage test.
Anti-Arcing Probe Card
In addition, MPI is offering optional temperature control of the pressurized air in a range of 20 to 200 °C, which correlate direct with the chuck set temperature. High-voltage testing without arcing at higher temperatures are possible now.
Regulatory approved MPI high power systems are configured with a safety interlock enabled dark box or an infrared laser light curtain design to provide a safe testing environment.
MPI High Power Selection Guide
|1998||建立Memory 32 DUT晶圓探針卡之服務能力|
|1999||建立50μm fine pitch晶圓探針卡之製程技術|
● recommended ○ available