• December 1 – 4, 2015
  • Georgia Tech Hotel and Conference Center, Atlanta, Georgia
  • Please come join the short course in Room Conference B
Invited ARFTG / NIST Short Course
[Subject:] On Wafer S-Parameters & Uncertainties
[Abstract:]Wafer-level S-parameter measurement at mm-wave and sub-mm wave frequencies plays a crucial role in the model development and IC design verification and debug of advanced semiconductor technologies. Accurate calibration of the entire wafer-level measurement system to the RF probe tip end or to the intrinsic device terminals is a critical success factor for extracting trustable device model parameters and characterizing true performance of a RF IC. This presentation will start with the basics of S-parameter measurement and calibration techniques at wafer-level. Special attention will be paid to how to choose the right calibration method for specific measurement application needs. Definition of the calibration reference plane and the measurement reference impedance of a calibrated system will be reviewed as well. Finally, the potential sources of calibration residual errors will be analyzed. Practical examples will be given on how to minimize the impact of such errors on the measurement accuracy of a calibrated probe system.
[Presenter:]Dr. Andrej Rumiantsev
[Time:]13:50 – 14:40, Tuesday, December 1st, 2015