MPI TS200-THZ Probe System

TS200-THZ Manual Probe System

TS200-THZ probe system expands MPI one-of-a-kind system solutions for emerging terahertz applications. It simplifies development of devices and circuits for commercial sub-millimetre-wave frequency applications, especially those embedded on 200 mm large silicon wafers.  Solid and stable chuck stage with no chuck elevation of the TS200-THZ, seamless integration of vector network analyzer frequency extenders of any type and frequency bands up to 1.7 THz  and boosted by the new unique features, such as Probe Hover Control, Chuck Auto-Lock and Auto-Contact, all these deliver the maximum possible measurement dynamic range and highest accuracy and reproducibility of measurement results.

MPI-AST-V20-001TS200-THZ Data Sheet

Features & Benefits

Air-Bearing Stage

The MPI air-bearing stage design, with simple single-handed puck control, provides unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25 mm x 25 mm XY-Theta micrometer movement.

TS200-THZ Manual Probe Station Unique platen lift

Platen Lift with Probe Hover Control™

The highly repeatable (1 µm) platen lift design with three discrete positions for contact, separation (300 µm), and loading (3 mm) with a safety lock utility are all examples of unparalleled functionality incorporated into MPI TS200-THZ manual probe system. These features prevent….


Chuck Z Adjustment

TS200-THZ has 10 mm fine chuck Z adjustment, designed to be flexible in the integration of different frequency extenders, like from Rohde & Schwarz, VDI or OML. Extremely beneficial for set-ups using several banded solutions on the same probe system – for easy and fast reset-up.

Multiple Configurations of MicroPositioners

The dedicated and extremely rigid probe platen design accommodates two bolt-down MP80 large area MicroPositioners in east-west configuration. Four port RF measurements or DC biasing is easy possible by having two North and South “bridges” as a standard configuration.

TS200-THZ Manual Probe System MP80-DX


Another MPI pioneering solution on the market – the unique MP80-DX with easy and precise definition down to 1 µm of Δl – is the ideal choice for accurate and cost-effective multiline TRL – the only RF calibration method in the mmW and sub-THz range. For more details, visit MPI QAlibria® software.


Courtesy of FBH

Various Chuck Options

The TS200-THZ is available with various chuck options to meet different budgets and application requirements such as MPI’s:…


Various Optic Options

A dedicated MPI Optics are available with a choice between a single tube MPI SuperZoom SZ10 or the MegaZoom MZ12 with up to 12x optical zoom and more than 45 mm working distance…

TS200-THZ Manual Probe System Extender Platform

Frequency Extenders Integrations

The TS200-THZ incorporates completely new design of frequency extender’s integration. In order to minimize the distance to the DUT, and to provide best possible measurement directivity, MPI introduced a novel concept which hovers the extender over the entire 200 mm wafer….