手動探針台 | 探針系統 | 200mm探測系統 | 探針台 | 200 mm晶圓探針 | 150mm探針系統 | 200 mm晶圓探測
MPI TS150-AIT & TS200-THZ
MPI TS150-AIT & TS200-THZ
TS150-AIT and TS200-THZ probe systems expand MPI one-of-a-kind system solutions for emerging THz applications such as high-speed 5G communication, satellites, non-invasive spectroscopy, security and surveillance, medical and health care equipment, and short range automotive radar by adding active impedance tuner integrations on the same probe stations. These two systems are the industry’s first explicitly designed 150 mm and 200 mm probe systems providing accurate tests for the combination of requirements for mm-wave, THz, and automated impedance tuner applications with best possible measurement directivity.
- Seamless integration of any banded, differential or broadband frequency extenders up to 1.5 THz and/or automated impedance tuners
- Novel design of extenders/tuners integration for maximum of measurement dynamic
- Maximum on mechanical stability and repeatability combined with convenient and safety operation
Features & Benefits
The MPI unique air-bearing stage design, with simple single-handed puck control, provides unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25x25mm XY-Theta micrometer movement.
Unique platen lift
with Probe Hover Control™
The highly repeatable (1 µm) platen lift design with three discrete positions for contact, separation (300 µm), and loading (3 mm) with a safety lock utility are all examples of unparalleled functionality incorporated into MPI TS200-THZ manual probe system. These features prevent unexpected probe or wafer damage while providing intuitive control, accurate contact positioning, and safety set-up. This capability is especially critical if probes in mmW and sub-THz range are so cost intensive.
Additional Probe Hover Control™ comes with hover heights (50, 100 or 150 µm) for easy and convenient probe to pad alignment.
Chuck Z Adjustment
TS150-THZ has 10mm fine chuck Z adjustment, designed to be flexible in the integration of different frequency extenders, like from Rohde & Schwarz, VDI or OML. Extremely beneficial for set-ups using several bended solutions on the same probe system – for easy and fast reset-up.
Multiple Configurations of MicroPositioners
The dedicated and extremely rigid probe platen design accommodates two bold->down MP80 large area MicroPositioners in east-west configuration. Four port RF measurements or DC biasing is easy possible by having two North and South “bridges” as a standard configuration.
Another MPI pioneering solution on the market – the unique MP80-DX with easy and precise definition down to 1µm of Δl – is the ideal choice for accurate and cost-effective multiline TRL – the only RF calibration method in the mmW and sub-THz range. For more details, visit MPI QAlibria®software.
Courtesy of FBH
Various Chuck Options
The TS200-THZ is available with various chuck options to meet different budgets and application requirements such as MPI’s:
- Standard RF Chuck with BNC connector,
- Dedicated mmW Chuck, completely build in special ceramic with high thermal conductivity (>180 W/Km), or even
- ERS AirCool RF Chuck (from 20°C to 200°C, or higher) with integrated Gold plated top surface with small vacuum holes
All chucks having two auxiliary chucks built in ceramic material for accurate RF calibration, especially in the range above 40 GHz.
Various Optic Options
A dedicated MPI Optics are available with a choice between a single tube MPI SuperZoom SZ10 or the MegaZoom MZ12 with up to 12x optical zoom and more than 45 mm working distance. The small factor of such microscopes is ideal for RF and mmW applications due to space restrictions inherent with the integration of frequency extenders requiring shortest distance to DUT.
Frequency extenders integrations
The TS200-THZ incorporates completely new design of frequency extender’s integration. In order to minimize the distance to the DUT, and to provide best possible measurement directivity, MPI introduced a novel concept which hovers the extender over the entire 200 mm wafer. Easy, convenient and fast reconfiguration is additional key feature of the new TS200-THZ probe station.
A crash protector is embedded into the design, for more safety operation, during switching between different bands.